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MEMSnet Home: MEMS-Talk: silicon pressure sensor
silicon pressure sensor
1996-02-14
Yu, Lianzhong
silicon pressure sensor
Yu, Lianzhong
1996-02-14
Hi, I would like to get some opinion from the experts and experienced engineers
in the silicon pressure sensor industry. Compare bulk micromachined silicon
pressure sensor with surface micromachined silicon pressure sensor
(piezoresistive only), which technique is better based on the manufacturing
process, its performance and application ? Which one will lead the future of
the sensing element ( if based on the current available information) ?

Thank you for your information

L.Yu


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