A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Photoresist as a release layer
Photoresist as a release layer
1996-12-05
Michael Little
Photoresist as a release layer
Michael Little
1996-12-05
I'm trying ot develop a device that will include metal cantilevers and
would like to use photoresist as a release layer.  I can't find any
references to any experience in this. Does anybody have any advice (don't
try this, it's easy, ...)or pointers to references?

Thanks,
         Mike



                 Mike


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
Tanner EDA by Mentor Graphics
University Wafer
Mentor Graphics Corporation