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MEMSnet Home: MEMS-Talk: dicing of MUMPS chip
dicing of MUMPS chip
2002-08-16
weiwei
passivation layer solution
2002-08-20
Xuchun Liu
2002-08-19
Michael D Martin
dicing of MUMPS chip
weiwei
2002-08-16
Dear everybody

     i have a released MUMPS chip. Is it possible subdice it without
killing' my microstructure?

     what can i do?

     I plan to use YAG laser to 'subdice' it---> which i have access. Is
that bit overkill?

Leow

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