Chang Liu-

Thank you for responding. I will use thin aluminum over the photoresist.
I'm looking for advice on how tho avoid stiction when I dissolve away the
photoresist release layer.  Do you have any experience with this or know
anyone that does?

Mike
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>I'm trying ot develop a device that will include metal cantilevers and
would like to use photoresist as a release layer.  I can't find any
references to any experience in this. Does anybody have any advice (don't
try this, it's easy, ...)or pointers to references?

Thanks,
         Mike



                 Mike