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MEMSnet Home: MEMS-Talk: lateral Gyro realized by high aspect-ratio structure.
lateral Gyro realized by high aspect-ratio structure.
2002-08-23
li gang
lateral Gyro realized by high aspect-ratio structure.
li gang
2002-08-23
Dear all,

Could you recommand some papers about gyros which could detect lateral
angular acceleration and are realized by high aspect-ration structure
(typical thickness is about 70 micros).

Thanks in advance,

Regards,





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