We are discussing extension of our current KOH-etching equipment with
a new, preferably automated, etch equipment.
Our current automated etcher was deliverd by PMPLAST and hasn't worked
so well, so we are looking for other providers.
Our wish list of desired properties for the etcher:
- Programmable etching time
- Automatic rinse and filling of the etch beaker with water after
etching.
- Operation temperature 30-85 degrees C
- Suitable for batch of min. 12 wafers of 4 inch
- Homogeneous temperature distriburion
- Capability of running with ultra sound
- Re-usable etchant option
Note: above list is a list of all our wishes, not all are requirements!
Could any of you please comment on your experience/equipment?
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Michiel Hamberg
IMC AB
Box 1084
S-164 21 Kista-Stockholm
Sweden
telephone +46 8 752 10 70
fax. +46 8 750 54 30
pager +46 740 301 396
e-mail [email protected]
WWW http://www.imc.kth.se/~michiel
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