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MEMSnet Home: MEMS-Talk: RTA for GaAs wafer
RTA for GaAs wafer
2002-09-03
이철형
RTA for GaAs wafer
이철형
2002-09-03
Is there anybody who knows why Graphite Box is necessary at RTA for GaAs ?
I never used Graphite Box for Si wafer=2E

I'm planning to use RTA for 4" GaAs wafer=2E Is there any reason to use thi=
s graphite box ?
Is there any supplier for this Graphite Box ?

Charlie Lee=0A=0A

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