There is a tool called a nanospec to measure thin-film thicknesses that
is typically used in most research facilities, at least that's what I
have used in the past to measure PR thickness on Si.

Here is the link to the company  http://www.nanometrics.com



-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Phang Jyh Siong
Sent: Tuesday, September 03, 2002 6:03 PM
To: [email protected]
Subject: [mems-talk] Is there an industrial standard for determination
of Photoresist thickness?


Hi, I am wondering if there is any standard for the determination of
Photoresist thickness when coated on Si wafer? If no, what is the common
practise? Thanks for your help.

Best Regards,

Phang Jyh Siong
Department of Mechanical Engineering (MSTI Portal)
National University of Singapore


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