Dear Kumar,

You may try a much shorter and much hotter alloying process before
annealing.

Good luck,

Oray Orkun Cellek
[email protected]
Middle East Technical University
EE Dept.
06531 Ankara
Turkey
Tel : +90 312 210 4579
Fax : +90 312 210 1261


----- Original Message -----
From: "Parshant Kumar" 
To: 
Sent: Thursday, September 05, 2002 8:29 PM
Subject: [mems-talk] delamination of Au/Ni/Ge/Au layers in Citric acid
solution etch


> Hi All,
>
> I am working with the wet etch of GaAs in citric
> acid:Hydrogen peroxide::5:1. I am facing the problem that
> Electrode deposited as Au/Ni/Ge/Au layers start delaminated
> after 55-60 mintues of etching. However if we anneal the
> sample for 30 mintues at the 150 degree calcious, the
> effect is less.
>
> Any comment will be appericiated
>
> Thx
>
> Kumar
> Maryland MEMS Lab
> University of Maryland
> College Park-MD 20742
> Tel 301-405-0364
>
>
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