Mr Cole,
 thanks a lot for your answer. I'm already using a similar solution, but I
need to contain tha amount of AlGaAs oxide etched. Since HCl doesn't
etch GaAs but etches  AlAs I believe the it will also attack the AlGaAs oxide
more than the GaAs oxide. Unfortunately, for my application, the amount of
AlGaAs etched must be below 5 nanometer, that is why I'm looking for some
solution which will attack only the GaAs oxide and not the AlGaAs.
Thanks for your suggestion

 Fabio Altomare


On Wed, 11 Sep 2002, Robert C Cole wrote:

>
> I believe a 10 % solution of HCl will etch the native oxide on GaAs.
>
> Bob Cole
> The Aerospace Corporation
>
>
>
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