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MEMSnet Home: MEMS-Talk: annealing of 2000A Gold
annealing of 2000A Gold
2002-09-13
Richard Morrison
annealing of 2000A Gold
Richard Morrison
2002-09-13
Hi,

When you heat Cr/Au films above 150c the Cr diffuses through the Au to the
surface and turns white (Cr/Au phase oxide). The good news is that there are
thickness of Au that the Cr cannot diffuse through in time that you would
anneal, so you must try some experiments.

Rick



Rick Morrison
Sr. Semiconductor Engineer
Radant Mems Inc.
255 Hudson Road
Stow Ma, 01775
Tel- 978-562-3866
Cell 508-801-4796
AMS Phone: 508-770-3521
EMAIL  [email protected]


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