I'm trying to ion mill some gold deposited on top of titanium adhesion
layer and I was wondering if any of you know or can suggest the etch rate
for GaAs or AlGaAs. I know that gold etch very fast but I have no idea
about GaAs/AlGaAs. If you could also suggest some reference or point out
any incompatibility in such process I would really appreciate it.
Thank you very much

Fabio Altomare