REGARDING 100 ng vibration sensor Gentlemen of the MEMS community:

I am looking for information about commercially available high resolution
vibration sensors. The application is an intrusion sensor, hence DC readout is
not required. The maximum g range should be 2g, and the resolution required is
100 ng/Rt-Hz from 20 Hz to 1 kHz. Size must be about 1 cm^3 or less.

The only sensors I am currently aware of are fairly large (order of 1 cubic
inch) geophones based on magnetic sensors, and large piezoelectric devices. Are
there any smaller geophone equivalents?

Thank you,
Jon Bernstein

Please respond to:
J. Bernstein
[email protected]
Draper Labs MS 37
555 Technology Square
Cambridge MA 02139