Hello Mr. Yu,

I have fabricated a capacitive pressure sensor using bulk micromachining for an
endoscopic surgical application. The sensor fabrication required oxidation,
patterning, EDP etch, sputtering of Aluminium and etching of pyrex glass. The
manufacturing process was quite fast and not complex. I also get very good
pressure sensitivity and range. The device can also withstand high temperatures
( upto 660 degrees Celcius) after which there is a problem of the Aluminium
melting). But I have not looked into surfacce micromachined pressure sensors
yet.

Sincerely,

Manish Mehta
School Of Engineering Science
Simon Fraser University
Burnaby
B.C.
Canada V5A 1S6
Tel.No. - (604) 294-1628
Fax - (604) 291-4951
Email - [email protected]