Mr L. Yu wrote:
> Hi,  I would like to get some opinion from the experts and experienced
> engineers in the silicon pressure sensor industry.  Compare bulk
> micromachined silicon pressure sensor with surface micromachined silicon
> pressure sensor (piezoresistive only),  which technique is better based on
> the manufacturing process, its performance and application  ?  Which one
> will lead the future of the sensing element ( if based on the current
> available information) ?
>
> Thank you for your information
>
> L.Yu
Dear Mr. Yu,

To save yourself (and others!) the grief of unecessary debate over the
questions you raised (which, quite frankly, are not clear to me) I would
suggest you obtain the performance characteristics of pressure sensors
fabricated by different groups. Addittional information, such as fabrication
cost, complexity and mask levels should help you make a better judgement as to
which will meet your need.

At Kulite Semiconductor Products, for example, we use a combination of bulk and
surface micromachining in our fabrication process to meet very tight specs.

I will be happy to send you our brochure if I have your address.

Robert Okojie.