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MEMSnet Home: MEMS-Talk: TMAH, EDP, Hydrazine etch rate data
TMAH, EDP, Hydrazine etch rate data
1996-02-16
[email protected]
TMAH, EDP, Hydrazine etch rate data
[email protected]
1996-02-16
Dear everyone:

We are looking for crystalline silicon etch rate data on the 100, 110 and 111
directions for TMAH, EDP and Hydrazine as a function of time and temperature. A
complete set of measured data in each of these etchants will win you a one year
free license of our Anisotropic Etch Simulator.

Sincerely,

IntelliSense Corporation
16 Upton Drive
Wilmington, MA 01887
(508) 988 - 8000
(508) 988 - 8001 fax


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