Many announcements are now available by World Wide Web in addition to ftp For
World Wide Web users, the URL is http://mems.isi.edu/mems.

Moderator's Note
The default return address when replying to a message from "mems" is, for many
users, also "mems". Please take note of this when replying to posted messages.
Thank you. - w.c. athas

MUMPs12 Run Information

The design deadline for the 12th ARPA-supported Multi-User MEMS Processes
(MUMPs) run is scheduled for 11 Mar. 96. MUMPs is available to all domestic
(USA and Canada) industry, academic, and government parties. For more
information, please see

WWW: http://mems.isi.edu/archives/Announcements/MUMPS12-deadline.html
http://mems.mcnc.org
FTP: /mems/Announcements/MUMPS12-deadline.txt

in the MEMS Archive ("mems.isi.edu").

Lost Item at Bay Area MEMS Journal Club Mtg.

A small brown leather Franklin Quest planner with the name Reiko Nakajima
written inside was lost at the 7 Feb. Journal Club meeting (at Stanford).
Please contact Kevin Yasumura at [email protected] if you have seen
it.


From "Terri DeLima"[email protected] Sat Jan 06 00:03:41 1996
To: [email protected]
Subject: Insitu doping
From: "Terri DeLima" [email protected]>
Date: Sat Jan 06 00:03:41 1996
Status: O
Content-Length: 311
Lines: 10

Does anybody have any information on insitu poly silicon doping. We are doing
deposition at 600#161#c , and are trying to achieve a resistivity of 0.1#189#/
cm

I need information on the ratios of phosphine/ silane, Anneal time & temp etc.
whatever anyone can give me.

Thank you
Terri DeLima
[email protected]