-Date: Mon, 30 Sep 2002 10:27:31 -0700 (PDT)
-From: Xing Yang 
-To: [email protected]
-Subject: [mems-talk] LTO on Au
-Reply-To: [email protected]


-I am looking for LTO deposition service on wafers with patterned Au
-structures. Since Au is a contamination for IC processes, most of
-the foundry places I have contacted in US do not allow wafers with Au
-to go into their furnaces. I wonder if anyone knows places that could
-do such a process for a small quantity of wafers. I am open to suggestions
-in Europe and Japan too.

-Thanks.

-Xing Yang


You may have more success with PECVD Oxide than LPCVD LTO.  People seem to be
more willing to put gold into these systems.  PECVD actually tends to give you a
better conformal coating over structures in any case.  In my experience, the
LTO/Oxide may not adhere very well to the gold.  You may want to use an adhesion
layer (ti, tiw, cr) on top of the gold.

Good luck.

Jason Tauscher
Senior Engineer -- MEMS Process
Microvision, Inc.