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MEMSnet Home: MEMS-Talk: Clean accessories
RE: LTO on Au
2002-10-01
Jason Tauscher
Clean accessories
2002-10-01
Balaji Lakshminarayanan
Clean accessories
Balaji Lakshminarayanan
2002-10-01
Hi,

I'd like to know if there are companies that can provide information on
dehumidifiers that is typically used in a cleanroom room. The area is
relatively small (40'*15'). What is the typical relative humidity in a
clean room (class 1000).

We want to create a mini-clean environment for our mems measurements. We
found that our cantilevers are absorbing moistures when taking RF
measurements.

Thanks for your time

bala




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