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MEMSnet Home: MEMS-Talk: DRIE informations
DRIE informations
2002-10-01
P. DUBREUIL
2002-10-01
[email protected]
2002-10-01
Andy McQuarrie
DRIE informations
Andy McQuarrie
2002-10-01
Hi Pascal,

I doubt anyone's going to put pricing up on the site but would encourage
you to contact STS via their web site: www.stsystems.com - local office
listing also on that site.

Regards, Andy



Message text written by INTERNET:[email protected]
>
hello
i would like to know the use of Argon or Nitrogen mixed with fluorocarbon
plasma DRIE?
what is percentage of those in plasma?

What is the principle of SOI-LF plasma etching?
Who are the salers of this system? and price?


thanks

pascal dubreuil

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