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MEMSnet Home: MEMS-Talk: SnO2 Etchant
SnO2 Etchant
2002-10-03
Mr. Rahul Mishra
2002-10-03
Rudolf Lessmann
SnO2 Etchant
Rudolf Lessmann
2002-10-03
You can use HI (acid) or FCl with zinc powder (use the zinc powder over the Sno2
as a catalisator).

rudolf

ps: if you wish I can search the articles who describe this procedure.

*********** REPLY SEPARATOR  ***********

On 03.10.02 at 21:31 Mr. Rahul Mishra wrote:

>Hi
>Can anybody tell me the etchant for Sno2, deposited using DC Magnetron
>Sputtering on Si substrate with Gold Electrodes ?
>
>
>
>
>
>Rahul Mishra
>Research Student (M.Sc.(Engg))
>Department of Instrumentation
>IISc, Bangalore-560012
>Ph. : 394 2349
>==============================
>Students' Hostel, E-67
>Ph. : 394 2622
>
>[email protected]
>[email protected]
>
>
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