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MEMSnet Home: MEMS-Talk: Re: Re: patterning on bulk ....
Re: Re: patterning on bulk ....
1996-02-21
Perry Skeath
1996-02-22
Padmaja Ramadas
1996-02-22
Arjun Selvakumar
1996-02-22
Perry Skeath
Re: Re: patterning on bulk ....
Padmaja Ramadas
1996-02-22
Here at the University of Cincinnati we use Shipley 1807 and do a hard bake at
120 C. we haven't had any problems. We have not tried higher hard bake temp.

padmaja


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