PETEOS on 4" wafers.  The desired thickness is 2.0-3.0um

-----Original Message-----
From: Renie Duvall [mailto:[email protected]]
Sent: Friday, October 04, 2002 10:24 AM
To: [email protected]
Subject: Re: [mems-talk] TEOS Vendor

Are you looking for PETEOS  or LPCVD TEOS and on what Diameter?

On Fri, 4 Oct 2002 06:42:03 -0700 (PDT) S W  wrote:

> Can anyone reccomend a TEOS vendor?
>
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1-360-263-8011

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