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MEMSnet Home: MEMS-Talk: amorphours silicon's mechnical characteristics.
amorphours silicon's mechnical characteristics.
2002-10-06
li gang
amorphours silicon's mechnical characteristics.
li gang
2002-10-06
Dear all,

I wonder if amorphous silicon could be used as mechanical structure such as
beam, membrane. How about its mechanical characteristics? Why we always use
polysilicon but not amorphours silicon as mechanical structure? Are there
any paper about this topic?
Any advice will be greatly appreciated.

Regards,

Li Gang


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