Dear all,

Does anyone has suggestions to the cleaning process for anodic bonding ?
Because we have concern of glass wafer for the electricstatic charge during
spin drying.
Please tell me the cleaning processes of glass wafer and silicon wafer.
Thanks.

 Best Regards,

  Welson
                     Walsin Lihwa Corp.
                    E-mail : Welson_Tang@walsin.com.tw