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MEMSnet Home: MEMS-Talk: thick aluminum film on wafers
thick aluminum film on wafers
2002-10-07
tdv218@hecky.it.northwestern.edu
2002-10-08
Neal Ricks
2002-10-08
Michele Migliuolo
2002-10-08
Renie Duvall
thick aluminum film on wafers
Neal Ricks
2002-10-08
Hi Tim,
Our company can provide this foundry service (thick Aluminum films).  We have
done 7 micron thick Aluminum (PVD) without any stress nor adhesion issues.  The
maximum for our system is probably close to 12 microns.  If you would like a
quote, let me know how many and what size wafers, as well as the thickness you
would like for us to target.
Best Regards,
Neal Ricks
Wafer Fab Manager
Shipley Co. LLC
540.552.4610x3875
 tdv218@hecky.it.northwestern.edu wrote:Hi all. I am trying to find a company
that either supplies silicon wafers
coated with a thick film of aluminum (2-10 micron) or one that will do
electroplating and chemical-mechanical polishing to achieve a thick aluminum
film with surface roughness minimized. All the aluminum plated wafers I've
found have had very thin films (
Thank you.
Tim



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