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MEMSnet Home: MEMS-Talk: Re: Photoresist question
Re: Photoresist question
1996-02-22
Wen Li
1996-02-23
Chang Liu
Re: Photoresist question
Wen Li
1996-02-22
Hi Chris,
We have had the same problem at JPL. The problem was solved by spraying PR but
the minimum thickness obtainable was about 3.5microns.
[email protected]


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