Andy,
Contact Dave Floucher at Telnet 2000. His phone number is (408)
573-1027.
They have parts for the PE aligners.
Milan
-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Andy
Sent: Friday, October 11, 2002 3:48 PM
To: [email protected]
Subject: [mems-talk] Regarding Perkin Elmer 340 HT Set-up tools
We recently purchased a Perkin Elmer Micralign 340 HT. We have found
someone to come in and set-up the aligner but they requested I have the
following tools available for them when they arrive.
The part numbers are from the manual for the Perkin Elmer.
1) Center of curvature tool, part # 677-2464
2) Focus wedge assembly, part # 644-0830
3) Distortion test set, part # 677-6564-001
4) Mask/wafer overlay set, part # 677-6563-001
I'm also looking for an OAI Intensity meter model number 316 w/ 365nm
probe.
Any help you can give me locating these tools will be highly
appreciated. Also is there a place I could rent these tools?
Thank you in advance for your time,
Andy
Andrew Leonard
Integrated Sensing Systems, Inc. (ISSYS)
Ypsilanti, MI 48198 USA
734-547-9896 ext. 135
[email protected]
www.mems-issys.com
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