Hello,
Electrostatic driving was discussed carefully in one chaper of a book
titled "Micro mechanical Transducers" (by Min-Hang Ba0)which was
published by a press from England. Stiction, or pull-in effect can be
eliminated by a serial capacitor.(Please refer to the book for the
details.)
If you have some difficulties approaching the book, please refer to
"R.Puers,D.Lapadatu,Electronstatic forces and their effects on
capacitive mechanical sensors, Sensors and Actuators A56 (1996)203-210".
Hope all these useful to you.
HuangShusen
Email: [email protected]