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MEMSnet Home: MEMS-Talk: KOH-Etch simulation
KOH-Etch simulation
1996-02-28
Henk
KOH-Etch simulation
Henk
1996-02-28
Hello everyone,

I am interested in a simulation program for the anisotropical etching of
<100> silicon wafers using KOH. Does anyone have some information about
this?

Greetings,

Henk.


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