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MEMSnet Home: MEMS-Talk: etching Si-N, but not Al2O3
etching Si-N, but not Al2O3
2002-10-22
Justin Borski
2002-10-22
BobHendu@aol.com
2002-10-22
kirt_williams@agilent.com
2002-10-22
Robert C Cole
etching Si-N, but not Al2O3
Robert C Cole
2002-10-22
I assume Si-N means silicon nitride.   Hot Phosphoric acid will etch silicon
nitride and I believe it will not attack Alumina.

Bob Cole
The Aerospace Corp.




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