Wenlin,
       If you use google and enter stiction, you will get a number of references
to stiction and how to cure it.  One of the items mentioned is the coating used
by T.I. for their D.M.D. Distortable Mirror Devices.  My company developed the
deposition units for T.I. for this process.  We also develop and manufacture a
number of plasma units for the Semiconductor and M.E.M.'s world.  If I can help
please contact me by email or phone 408 954 8353.  Bill Moffat

-----Original Message-----
From: [email protected] [mailto:[email protected]]
Sent: Thursday, October 10, 2002 6:58 AM
To: [email protected]
Subject: [mems-talk] stiction of contacting surfaces


Hello:

I'm working on electrostatic curved beams.   It has been observed that
after certain cycles of operation, stiction of the beam to substrate
occurs. I'm wondering if there are researches done on the mechanism of the
stiction and how it can be avoided. Any information will be appreciated.

Best regard

Wenlin Jin



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