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MEMSnet Home: MEMS-Talk: depositing stainless steel thin films
SrTiO3 etching
2002-10-16
Sergei V. Kalinin
depositing stainless steel thin films
2002-10-24
Robert Dean
depositing stainless steel thin films
Robert Dean
2002-10-24
>Hello,

Does anyone know if it is possible to deposit a thin layer of stainless
steel (any of the stainless steel alloys) by sputtering or E-beam
deposition?  I have not been able to locate a target for either
process.  Stainless steel has some interesting adhesion properties I would
like to exploit in MEMS applications.

Sincerely,

Robert Dean

Research Associate IV
Center for Advanced Vehicle Electronics
Auburn University
200 Broun Hall
Auburn, AL 36849

Voice: 334-844-1838
Fax:   334-844-1898
Email: rdean@eng.auburn.edu
Web: http://www.eng.auburn.edu/~rdean



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