At 14:16 28.02.1996 +0100, you wrote:

>Hello everyone,
>
>I am interested in a simulation program for the anisotropical etching of
><100> silicon wafers using KOH. Does anyone have some information about
>this?
>
>Greetings,
>
>Henk.
>


Try SIMODE (Simulation of the Orientation Dependent Etching). You might contact
for the technical support:

GEMAC mbH
Mr. D. Zielke
Matthesstr. 53
D-09113 Chemnitz
Tel.: +49(371) 9119260
Fax.: +49(371) 9119272

Regards,
Aylin

**************************************************************************
Aylin Hein, Technical University Berlin, Microsensor & Actuator Technology
Email:  ahein@mat.ee.tu-berlin.de
URL:    http://www-mat.ee.tu-berlin.de/