Hi, Bill:

Thank you for your information and it was nice to talk to you last time.
There is a concern about deposit an aniti-stiction layer to the device.
Will the reflectivity of the surface be effected? In our application,
reflectivity is an important parameter. Do you have the related data on
this?

Best regards

Wenlin





"Bill Moffat" @memsnet.org on 10/24/2002
03:50:44 PM

Please respond to [email protected]

Sent by:  [email protected]


To:   
cc:
Subject:  RE: [mems-talk] stiction of contacting surfaces


Wenlin,
      If you use google and enter stiction, you will get a number of
      references to stiction and how to cure it.  One of the items
      mentioned is the coating used by T.I. for their D.M.D. Distortable
      Mirror Devices.  My company developed the deposition units for T.I.
      for this process.  We also develop and manufacture a number of plasma
      units for the Semiconductor and M.E.M.'s world.  If I can help please
      contact me by email or phone 408 954 8353.  Bill Moffat

-----Original Message-----
From: [email protected] [mailto:[email protected]]
Sent: Thursday, October 10, 2002 6:58 AM
To: [email protected]
Subject: [mems-talk] stiction of contacting surfaces


Hello:

I'm working on electrostatic curved beams.   It has been observed that
after certain cycles of operation, stiction of the beam to substrate
occurs. I'm wondering if there are researches done on the mechanism of the
stiction and how it can be avoided. Any information will be appreciated.

Best regard

Wenlin Jin



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