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MEMSnet Home: MEMS-Talk: AE for stiction Minimization
AE for stiction Minimization
1996-03-01
Justin D. Mansell
AE for stiction Minimization
Justin D. Mansell
1996-03-01
Has anyone ever investigated the use of acoustic waves for the elimination of
stiction when releasing micromachined devices?


--
Justin Mansell          |       "Only torture will bring
EMAIL:[email protected]  |           out the truth."
1262 Cook Ave.          |
Cleveland, OH  44107    |               - C.S. Lewis


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