Hi, all

I am a new member on MEMS. I am trying to understand a capacitor structure
composed of silicon/silicon dioxide/ silicon nitride sandwich. I am wondering
why need a silicon dioxide layer in the middle? silicon nitride is also a good
insulator, why we need two insulators for a capacitance? Are there big
difference between silicon dioxide and silicon nitride, especially on electrical
property?

Thanks a lot

Qintao Zhang



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