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MEMSnet Home: MEMS-Talk: How can I etch gold slowly (~100 nm/min)
How can I etch gold slowly (~100 nm/min)
2002-10-29
Sampo Tuukkanen
2002-10-30
Antje Wiegand (2 parts)
How can I etch gold slowly (~100 nm/min)
Sampo Tuukkanen
2002-10-29
Hi,

how can I etch gold slowly (~100 nm/min)?
Can I slow etching by diluting etch-solution (4g KI / 1g I2 / 40ml H2O),
which etches 500-1000 nm/min?
If so, does the etch-rate reduce linearly with consentration of KI and I2?


-Sampo Tuukkanen, University of Jyväskylä, FINLAND



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