Well according to me, it is difficult to deposit silcion nitride directly on
silicon , so it might be the reason for the same.

----- Original Message -----
From: "Qintao Zhang" 
To: 
Sent: Monday, October 28, 2002 6:14 PM
Subject: [mems-talk] silicon/sio2/si3n4


>
> Hi, all
>
> I am a new member on MEMS. I am trying to understand a capacitor structure
composed of silicon/silicon dioxide/ silicon nitride sandwich. I am
wondering why need a silicon dioxide layer in the middle? silicon nitride is
also a good insulator, why we need two insulators for a capacitance? Are
there big difference between silicon dioxide and silicon nitride, especially
on electrical property?
>
> Thanks a lot
>
> Qintao Zhang
>
>
>
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