>Has anyone ever investigated the use of acoustic waves for the
>elimination of stiction when releasing micromachined devices?
>>--
>Justin Mansell          |       "Only torture will bring
>EMAIL:[email protected]  |           out the truth."
>1262 Cook Ave.          |
>Cleveland, OH  44107    |               - C.S. Lewis
>


The MEMS group at UIUC is investigating acoustic waves for stiction and
stick-slip friction problems. The method shows promise, but much more work
needs to be done, both experimentally and theoretically. We're also interested
in others results.


Mark A. Shannon
Assistant Professor of Mechanical Engineering
Department of Mechanical and Industrial Engineering
University of Illinois at Urbana-Champaign
address:124 MEB  MC-244, 1206 W. Green St., Urbana, IL 61801
voice: 217-244-1545  fax: 217-244-6534  e-mail: [email protected]