Josef,
All you ever wanted to know about bonding, including Si-Si, is a book called
"Semiconductor Wafer Bonding: Science and Technology", by Q.-Y. Tong and U.
Gosele, available from John Wiley & Sons, Inc, you can find it on the internet.
It contains a lot of information concerning Si-Si bonding and should answer your
questions.
Clif
Clifford J. Hamel
Suss Microtec Applications Engineer
(802) 244-5181, ext 297
>>> [email protected] 10/31/02 02:17PM >>>
Hi all MEMS talk members,
can anybody give me some advise how to bond two silicon wafers together?
Do I need some special wafers for it or can I use common wafers? I would
also appreciate any reliable and good information source about this
problem.
Thanks for your help
Best Regards
Josef Kouba
Louisiana State University
Center foot Advanced Microstructures & Devices
6980 Jefferson Hwy.
Baton Rouge, LA 70806, USA
(225) 578-9371 - Tel.
(225) 578-6954 - Fax.
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