Jeff, The burden is yours, not the forums- there is a delete key on your
computer - last time I checked mine... as this topic that is relavent to
many MEMS users and research entities and better to ask the voice of
experience rather than fall to the prey of those that think they know.
Josef,
I have a contact that you can call about this- he has current experience
with both anodic ( no oxide) and fusion ( with Si02) . The process to
set either solution up is quite cost effective and simple with the right
tools.
Regards,
Ken Smith
Jeff Birkmeyer wrote:
> Josef,
>
> Why don't you try a google search before you burden this forum with
> questions like this. There is a ton of info on this out there.
>
> Regards,
>
> Jeff
>
> -----Original Message-----
> From: Josef Kouba [mailto:[email protected]]
> Sent: Thursday, October 31, 2002 11:18 AM
> To: 'MEMS talk'
> Subject: [mems-talk] Bonding Si to Si
>
>
> Hi all MEMS talk members,
>
> can anybody give me some advise how to bond two silicon wafers together?
> Do I need some special wafers for it or can I use common wafers? I would
> also appreciate any reliable and good information source about this
> problem.
>
> Thanks for your help
>
> Best Regards
>
> Josef Kouba
> Louisiana State University
> Center foot Advanced Microstructures & Devices
> 6980 Jefferson Hwy.
> Baton Rouge, LA 70806, USA
> (225) 578-9371 - Tel.
> (225) 578-6954 - Fax.
>
>
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://www.memsnet.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/
>
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://www.memsnet.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/
>
>
--
Kmbh Associates
47 Rocket Circle
Rancho Cordova, CA 95742 U S A
510-714-5055 Efax- 510 217 4421 or 561 658 6136
High Purity Float Zone and Specialty CZ Silicon for Power, IR and
Mirror Optics, Optoelectronics, MEMS, SOI, and other Semiconductor
applications. Service in SOI, Polishing SSP and DSP.
Quartz, Glass, Pyrex and Borofloat Wafer Supply. Anodic Bonding. SOG, SOS.
