A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: TiN etching in KOH
TiN etching in KOH
2002-11-04
Andrew Dowling
TiN etching in KOH
Andrew Dowling
2002-11-04
Hello All,

Can anyone please tell me the etching behaviour of Titanium Nitride in
KOH etchant.
Could you provide references if you know of any.

Thank-you

Andrew Dowling

MiniFab
Australia


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
MEMStaff Inc.
Process Variations in Microsystems Manufacturing
The Branford Group