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MEMSnet Home: MEMS-Talk: 1 micron thick low stress nitrides?
1 micron thick low stress nitrides?
2002-11-04
Michael D Martin
2002-11-05
Mighty Platypus
2002-11-05
bille@npphotonics (Bill Eaton)
2002-11-05
kirt_williams@agilent.com
2002-11-05
Michael D Martin
2002-11-05
kirt_williams@agilent.com
2002-11-05
kirt_williams@agilent.com
1 micron thick low stress nitrides?
Michael D Martin
2002-11-04
Hi,
  Does anyone know whether it is possible to produce low stress nitride
films that are a micron thick or thicker? If so, where can I get them?
  a related question ...
  How thick of a silicon nitride film would be required to span 8mm
after release?

Thanks in advance,
          Mike Martin


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