Although be careful - cyanoacrylate needs water to cure.  Ussually it gets
enough moisture from the air.  If you are bonding two large areas that are
smooth and non-porous (like silicon wafers!), you may find that the stuff in
the middle remains liquid.

Not that it isn't worth a try, of course!

David Nemeth
Senior Process Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Michael D Martin
Sent: Tuesday, November 05, 2002 3:03 PM
To: [email protected]
Subject: Re: [mems-talk] Bonding material impervious to KOH bath


Try Super Glue, aka cyanoacrylate. It works well in TMAH and EDP.  It
can be dissolved it in acetone, though I've been bonding the front of
wafers to chrome coated glass and then etching the chrome to release.

Good luck,
   mike


>>> [email protected] 11/02/02 10:32AM >>>
Are there materials that can used for wafer bonding
that doesn't get etched/stripped in KOH bath? I've
already tried Apiezon black wax, crystal bond, SU-8
(not fully crossed), but they all seems to not work
quite well. I would appreciate any advice.
Thanks,
Kevin

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