Hi all MEMS talk members,

I'm wondering what values could I use to obtain low stress Ti/Au thin films?
May be you know where I could find these informations or people who are
concerned with?

Thanks for your help.

Best regards

Nicolas FAURE
Developement Engineer
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COLIBRYS SA Microsystems Manufacturing
Maladière 83
2007 Neuchâtel
SWITZERLAND
Web site          www.colibrys.com
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Direct phone      0041-32-720-5059
Fax:              0041-32-720-5784
E-mail            nicolas.faure@colibrys.com