Hi, here's a follow up to a thread from last week. I've run into a
problem. I'm etching through a wafer in EDP to release membranes with a
bunch of perforations in them. When I break through the wafer it has
become clear that the EDP causes cyanoacrylate to turn to a gel. The
sample is then free to slide off the handle glass. :( Any suggestions?

-Mike


>>> [email protected] 11/05/02 04:21PM >>>
>Here's another removal method:
>Heating the cyanoacrylate on a hot plate to above about 200 C
>decomposes it so that the wafers can be separated.
>The powdery residue can then be wiped off with acetone.

>       --Kirt Williams Agilent Technologies

> -----Original Message-----
> From: Michael D Martin [mailto:[email protected]]
> Sent: Tuesday, November 05, 2002 12:03 PM
> To: [email protected]
> Subject: Re: [mems-talk] Bonding material impervious to KOH bath
>
>
> Try Super Glue, aka cyanoacrylate. It works well in TMAH and EDP.
It
> can be dissolved it in acetone, though I've been bonding the front
of
> wafers to chrome coated glass and then etching the chrome to release.

>
> Good luck,
>    mike
>
>
> >>> [email protected] 11/02/02 10:32AM >>>
> Are there materials that can used for wafer bonding
> that doesn't get etched/stripped in KOH bath? I've
> already tried Apiezon black wax, crystal bond, SU-8
> (not fully crossed), but they all seems to not work
> quite well. I would appreciate any advice.
> Thanks,
> Kevin
>