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MEMSnet Home: MEMS-Talk: Re: patterning 3D objects
Re: patterning 3D objects
1996-03-11
Padmaja Ramadas
1996-03-11
Mac McReynolds
Re: patterning 3D objects
Padmaja Ramadas
1996-03-11
Dr Kevin Walsh,

recently I read an article "photolithography on micromachined 3D surfaces using
electrodeposited photoresits" Sensors and Actuators A 51 1995 51-54.

This talks about deposition of photoresist upto 3 um in etched surfaces.

may be this would be helpful.

padmaja


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