Jeff,
     A possible 2 step process.  1) plasma deposit HMDS a soft goopy material
about the consistency of jello.  This can be as thick as you need and is totally
hydrophobic.  Then dice then with the die in waffle packs use a plasma to remove
the deposited HMDS.  My company has manufactured equipment for both of these
processes but not for this type of use.  Contact me if you think I can help.
Bill Moffat

-----Original Message-----
From: Jeff Hibner [mailto:[email protected]]
Sent: Friday, November 22, 2002 7:45 AM
To: [email protected]
Subject: [mems-talk] MEMS Dicing question


We have developed a MEMS based microphone that will be used in the cell
phone industry.  One of the problems we have run into is in the dicing
process.  The membranes on the chip are very fragile and can very easily
damaged.  We can't use tape directly on the chips and water would hurt
them.  We are experimenting with using two layers of tape with the first
layer having holes punched out where the membranes will be and the
second layer forms a tent over them.  With this process the membranes
will never touch the tape.
If there is anyway your company could help us we'd appreciate any ideas
and would enjoy working with you.

Thank you,

Jeff Hibner
Akustica Inc.
2403 Sidney Street
Pittsburgh PA 15203
Phone 412-390-1730
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