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MEMSnet Home: MEMS-Talk: best practices for cleaning wafers/glassware?
best practices for cleaning wafers/glassware?
[email protected]
2002-11-27
Anon,
We have found that lens paper is our only option for cleaning wafers that have
photoresist on them.  Otherwise, if the wafers do not have photoresist then
you can clean them first with acetone then isopropanol.
Scott

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